Measurement of empty ceramic carriers: It is important that the carrier is clean from previous waxing processes, further it is important that the Flatness of the carrier is within spec and that it is convex.

The tool is capable to measure the pockets that can be seen on the carriers after they were used for several waxing and polishing processes, this gives a clear answer when a carrier should be reworked.

 

WIMEKO-FM600-Polishcheck

 

  • Wax left over from previous process Pockets from carrier can be seen on the wafer after polishing.
  • Pockets from carrier can be seen on the wafer after polishing.

 

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